Phenom Pharos Desktop SEM
The Thermo ScientificTM Phenom Pharos is a desktop SEM with a FEG source that makes crisp, high-brightness images and the benefits of a FEG source accessible to everyone. It is also easy to operate, from the initial installation to the actual usage, thanks to its intuitive and compact design.
The advanced hardware design and detectors enable a fast time to image and easy, foolproof handling.
Phenom Pharos Desktop SEM. Resolution. Re-imagined.
Specifications
Phenom Pharos Desktop SEM

Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 2 kV and 15 kV
Vacuum modes
- Charge reduction mode (low vacuum mode)
- High vacuum mode
- Medium vacuum mode
Detector
- BSD
- EDS (optional)
- SED (optional)
Sample size
Sample height
Phenom XL Desktop SEM
Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 4.8 kV and 20.5 kV imaging and analysis mode Secondary Electron Detector
Vacuum modes
- Charge reduction mode (low vacuum mode)
- High vacuum mode
- Medium vacuum mode
Detector
- BSD
- EDS (optional)
- SED (optional)
Sample size
- Max. 100 mm x 100 mm
- Up to 36 x 12 mm pin stubs
Sample height
Phenom Pro X Desktop SEM
Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 4.8 kV and 15 kV imaging and analysis mode
Vacuum modes
- Charge reduction mode (low vacuum mode)
- High vacuum mode
Detector
- BSD
- EDS
- SED (optional)
Sample size
Sample height