Phenom XL Desktop SEM
The Phenom XL Scanning Electron Microscope (SEM) pushes the boundaries or compact desktop SEM performance. It features the proven ease-of-use and fast time-to-image or any Phenom system.
It is equipped with a chamber that allows analysis of large samples up to 100 mm x 100 mm. A proprietary venting / loading mechanism ensures the fastest vent / load cycle in the world, providing the highest throughput.
A newly developed compact motorized stage allows the user to scan the full sample area, and yet the Phenom XL is a desktop SEM that needs little space and no extra facilities.
Specifications
Phenom XL Desktop SEM

Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 4.8 kV and 20.5 kV imaging and analysis mode Secondary Electron Detector
Vacuum modes
- Charge reduction mode (low vacuum mode)
- High vacuum mode
- Medium vacuum mode
Detector
- BSD
- EDS (optional)
- SED (optional)
Sample size
- Max. 100 mm x 100 mm
- Up to 36 x 12 mm pin stubs
Sample height
Phenom Pharos Desktop SEM
Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 2 kV and 15 kV
Vacuum modes
- Charge reduction mode (low vacuum mode)
- High vacuum mode
- Medium vacuum mode
Detector
- BSD
- EDS (optional)
- SED (optional)
Sample size
Sample height
Phenom Pro X Desktop SEM
Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 4.8 kV and 15 kV imaging and analysis mode
Vacuum modes
- Charge reduction mode (low vacuum mode)
- High vacuum mode
Detector
- BSD
- EDS
- SED (optional)
Sample size
Sample height