Phenom XL Desktop SEM
The Phenom XL Scanning Electron Microscope (SEM) pushes the boundaries or compact desktop SEM performance. It features the proven ease-of-use and fast time-to-image or any Phenom system.
It is equipped with a chamber that allows analysis of large samples up to 100 mm x 100 mm. A proprietary venting / loading mechanism ensures the fastest vent / load cycle in the world, providing the highest throughput.
A newly developed compact motorized stage allows the user to scan the full sample area, and yet the Phenom XL is a desktop SEM that needs little space and no extra facilities.
Specifications
Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
Vacuum modes
Detector
Sample size
Sample height
Phenom XL Desktop SEM
Light optical magnification
3 - 16x
Electron optical magnification range
80 - 100,000x
Resolution
< 14 nm
Digital zoom
Max. 12x
Light optical navigation camera
Color
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 4.8 kV and 20.5 kV imaging and analysis mode Secondary Electron Detector
Vacuum modes
- Charge reduction mode (low vacuum mode)
- High vacuum mode
- Medium vacuum mode
Detector
- BSD
- EDS (optional)
- SED (optional)
Sample size
- Max. 100 mm x 100 mm
- Up to 36 x 12 mm pin stubs
Sample height
Max. 65 mm
Phenom Pharos Desktop SEM
Light optical magnification
20– 134x
Electron optical magnification range
200– 1,000,000x
Resolution
4 nm (BSD) & 3 nm (SED)
Digital zoom
Max. 12x
Light optical navigation camera
Color
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 2 kV and 15 kV
Vacuum modes
- Charge reduction mode (low vacuum mode)
- High vacuum mode
- Medium vacuum mode
Detector
- BSD
- EDS (optional)
- SED (optional)
Sample size
Up to 32 mm (Ø)
Sample height
Up to 32 mm (Ø)
Phenom Pro X Desktop SEM
Light optical magnification
20 - 134x
Electron optical magnification range
80 - 150,000x
Resolution
< 10 nm (BSED) & < 8 nm (SED)
Digital zoom
Max 12x
Light optical navigation camera
Color
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 4.8 kV and 15 kV imaging and analysis mode
Vacuum modes
- Charge reduction mode (low vacuum mode)
- High vacuum mode
Detector
- BSD
- EDS
- SED (optional)
Sample size
Up to 32 mm (Ø)
Sample height
Up to 100 mm (h)
Experience a fast and accurate analysis of your own samples
Get a free demo at a location near you that’s tailored to your needs
Case Studies
Scientist at DSM Ahead 
Dr. Arnaud Chiche
Process Engineer, Mosa 
Berry Veltman
Gallery
We are working on SEM images for this specific combination. For an impression take a look at all our SEM images.
